Fully Automated 150 mm MEMS Vacuum Probing System to Test Wafers Using a Probe Card & Individual Manipulators

Fully Automated MEMS Vacuum Wafer Probe System with Black Bodies to Test 150 mm and 200 mm Wafers

Semiautomatic 200 mm MEMS Vacuum Prober with Programmable Manipulators and Hot / Cold Thermal Chuck System

Fully Automated Vacuum MEMS Probing System to Test 150 mm and 200 mm Wafers in Carriers using Programmable Manipulators and Probe Cards

Multi-purpose Manual 300 mm Vacuum Probing System to Test Devices up to 10 KV in a Vacuum Environment and also Perform Device Characterization in an Open Air Environment using Programmable Manipulators

Vacuum Probing Systems

SemiProbe manufactures a family of vacuum probing systems - manual, semiautomatic, and fully automatic for applications ranging from R&D to Production.

The vacuum probe systems will test wafers or substrates up to 300 mm in a vacuum environment. Individual die and broken/partial wafers can also be tested. The system is built using our patented PS4L adaptive architecture. All key modules are interchangeable to provide unsurpassed flexibility. The interchangeable modules make it easy to convert to provide testing solutions for a variety of applications - DC, HF, MEMS, High Voltage and more.

Product Family - manual, semiautomatic and fully automatic
R&D to Production - die, partial wafers and whole wafers to 300 mm
Easily customized to meet a variety of applications and budgets
Ideal for MEMS, Sensors, Switches, Microbolometers or any product that is vacuum-packaged. Also used for High Voltage testing up to 10 KV.
Multiple Accessories - programmable manipulators, probe card holders, thermal chucks, vibrometers, black bodies, laser cutter and more

Vacuum Probing Systems

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