Vacuum Pump

SemiProbe provides a small footprint and quiet vacuum pump. The vacuum pump is typically located close to the probe system. A quite vacuum pump is appreciated if the user is going to spend a few hours at a time using the probe system.

The vacuum pumps are primarily used to hold the device being tested on the chuck (wafer, chip, substrate, packaged part) and for vacuum based manipulators.  The most common vaccum pump SemiProbe supplies is listed below but several different types are available if desired.

Vacuum Pump Specification

Rated Voltage: 115 V AC or 230 V AC

Rated Frequency:  60 Hz or 50 Hz

Input Power: 15/14 W

Rated Time: Continuous

Maximum Current:    0.28 A/0.18 A

Maximum Vacuum:   -250 mmHg (-9.84 inchHg)

Open Air Flow:  6L/min (0.21 cfm)

Gross Weight:  1.2 Kg (2.65 pounds)

External Dimensions:  145 mm (L) x 84 mm (W) x 134 mm (H)

Fuse:   1 A, 250 V AC (5.0 mm dia x 20 mm) – consumable glass body cartridge

Power Switch: Rocker Switch (250 V AC, 6 A)

Power Cord Length: 2.5m

Noise Level:    40 dB at -26.6 kPa

Ambient Temperature: 0 to 40 C

Ambient Humidity:   30 to 85%