Manipulator Datasheet Table

Chuck	Type	Size	Material	Plating	Comments	Image
Standard	Round, Square	50 mm to 300 mm	Aluminum	Nickel, Gold	Vacuum, Concentric Rings, Ground or Bias
Standard Coaxial	Round, Square	50 mm to 300 mm	Aluminum	Nickel, Gold	Vacuum, Concentric Rings, Ground or Bias
Standard Triaxial	Round, Square	50 mm to 300 mm	Aluminum	Nickel, Gold	Vacuum, Concentric Rings, Ground or Bias
High Frequency	Round, Square	100 mm to 300 mm	Aluminum	Nickel, Gold	Vacuum, Holes, with 2 Independent Auxiliary Chucks with and without ceramic inlays
Thermal Chucks	Round, Square	100 mm to 300 mm	Aluminum	Nickel, Gold	Common temperatures: ambient to 200 C, ambient to 300 C, -40 C to 200 C, -40 C to 300 C, -60 to 200 C, -60 to 300 C, several other temperature ranges available; cooling air or recirculating chiller; Addon Surfaces - triaxial, high frequency, high power and lift pin; Vacuum Chamber compatible
High Power	Round	100 mm to 300 mm	Aluminum	Nickel, Gold	Vacuum Holes, 3 KV to 10 KV, coaxial and triaxial versions; Chuck Cables - SHV, Coaxial and triaxial; Cables and Connectors are instrument dependent; Vacuum Chamber compatible
Lift Pin	Round or Square	100 mm to 300 mm	Aluminum	Nickel, Gold	Vacuum grooves or holes; ambient and thermal
Universal	Round or Square	150 mm - 300 mm	Aluminum	Black Anodize	Mechanical Clamping; Holds wafers mount on metal frames, plastic hoops, and trays of die
Custom	Round or Square	100 mm to > 600 mm	Aluminum, Copper, Ceramic, Glass, Quartz	Nickel, Gold, Black Anodize	Contact us for your special chuck requirements