Fully Automatic 200 mm MEMS Wafer Probing System with a Dual End-effector to Handle Wafers, Frames, and Trays of Die

Fully Automated MEMS Vacuum Wafer Probe System with Black Bodies to Test 150 mm and 200 mm Wafers

Semiautomatic 200 mm Double-Sided Probing System for testing MEMS devices using probe cards and programmable manipulators in a dark environment

Semiautomatic 200 mm Double-Sided Probing System for Testing MEMS Devices Using a Metallurgical Microscope, Probe Cards and Programmable Manipulators in a Dark Environment

Fully Automated 150 mm MEMS Vacuum Probing System to Test Wafers Using a Probe Card & Individual Manipulators

Manual 200 mm MEMS Probing System with a Polytec MSA 500 Motion Analyzer

Semiautomatic 200 mm MEMS Vacuum Prober with Programmable Manipulators and Hot / Cold Thermal Chuck System

Fully Automated Vacuum MEMS Probing System to Test 150 mm and 200 mm Wafers in Carriers using Programmable Manipulators and Probe Cards

Semiautomatic PS4L 200 mm MEMS Microfluidics Wafer Probe System using Dispense Systems a High-Pin Count Probe Card and a Keithley Series 500 Test Instrument System

MEMS Probe Systems

MEMS device probing requirements continue to evolve to include multiple technologies in one device – DC, HF, Optical, microfluidic and more. They often need to be tested at temperature (hot and cold) and under vacuum. Static and dynamic analysis and visualization are critical parts of the test and development process for MEMS microstructures to characterize surface metrology and measure in and out of plane motions. The PS4L Adaptive Architecture is ideal for configuring a system to perform tests to very specialized requirements of the MEMS customer. Often that means integrating a variety of instrumentation to the probe system – thermal chucks, parametric analyzers, vector network analyzers, motion analyzers, blackbodies, IR thermometers and more. MEMS customers often require their devices to be tested under vacuum. SemiProbe provides a family of manual, semiautomatic and fully automatic probers to address testing under vacuum – DC, HF, optical and temperature. SemiProbe has probing solutions for Gyros, Accelerometers, Microbolometers, Sensors, Optical Mirrors, Switches, Microfluidics and more.

MEMS Probe Systems

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